IMPRINTING MOLD, IMPRINTING METHOD, MANUFACTURING METHOD OF WIRE GRID POLARIZER, AND WIRE GRID POLARIZER

摘要

PROBLEM TO BE SOLVED: To prevent the occurrence of a defect region due to deformation caused by the flexibility of an imprinting mold, in a molding material that is brought into contact with a pattern region of the mold.SOLUTION: An imprinting mold 11 having flexibility as a whole includes a first pattern part 22 forming a first pattern region 12 and a second pattern part 23 forming a second pattern region 13. Irregular shapes 32 and 33 are formed in the first pattern region 12 and the second pattern region 13, respectively. The irregular shape 33 in the second pattern region 13 functions as a dummy pattern. The height H1 of the first pattern part 22 and the height H2 of the second pattern part 23 are the same to each other. The irregular shapes 32 and 33 are formed in a line-and-space pattern. A projecting part 33B of the irregular shape 33 in the second pattern region 13 comprises a sub irregular shape formed in a line-and-space pattern, and the pitch of the sub irregular shape 331 is the same as that of the irregular shape 32.SELECTED DRAWING: Figure 2