发明名称 |
COATED COMPRESSIVE SUBPAD FOR CHEMICAL MECHANICAL POLISHING |
摘要 |
Coated compressive subpads for polishing pad stacks and methods of fabricating coated compressive subpads for polishing pad stacks are described. In an example, a polishing pad stack for polishing a substrate includes a polishing pad having a polishing surface and a back surface. The polishing pad stack also includes a compressive subpad with a first surface having a first pressure sensitive adhesive layer coated thereon. The first surface of the compressive subpad is coupled directly to the back surface of the polishing pad by the first pressure sensitive adhesive layer. |
申请公布号 |
WO2016081272(A1) |
申请公布日期 |
2016.05.26 |
申请号 |
WO2015US60343 |
申请日期 |
2015.11.12 |
申请人 |
NEXPLANAR CORPORATION |
发明人 |
SCOTT, DIANE;LEFEVRE, PAUL ANDRE |
分类号 |
B24B37/22;B24B37/24 |
主分类号 |
B24B37/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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