METHOD OF MANUFACTURING TEMPLATE

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a pattern for imprinting having a high accuracy fine pattern and a method of manufacturing a template.SOLUTION: A method of forming a pattern for imprinting includes: laminating a chromium thin film 41 on a substrate 31; forming a polymerizable resin layer 33 on the chromium thin film 41; overlapping a prepared transparent template 10 for imprinting and the polymerizable resin layer 33 on the a quartz substrate 31; molding the polymerizable resin layer 33 with a first pattern 13, which is a pattern of the template 10 for imprinting; forming on the polymerizable resin layer 33 a second pattern 43 constituted of irregularity which is a reverse type shape of the first pattern; forming a third pattern 45 constituted of a chromium thin film on the quartz substrate 31 using the second pattern 43 as a mask; and forming a fourth pattern 47 constituted of irregularity on a surface of the substrate 31 using the third pattern 45 as a mask.SELECTED DRAWING: Figure 4