发明名称 PHYSICAL QUANTITY DETECTION DEVICE AND PHYSICAL QUANTITY DETECTION METHOD
摘要 PROBLEM TO BE SOLVED: To reduce deterioration in an SN ratio and the occurrence of a DC offset.SOLUTION: A voltage detection device 1 detects the voltage V1 of a detection object 52 on the basis of detection current I that occurs in a physical system when capacitance is changed between a detection electrode 11 for a physical system including the detection object 52 and the detection object 52. The voltage detection device comprises: a vibrator 13 that changes the capacitance by vibrating on the basis of drive current Idv; and a current-to-voltage conversion circuit 14 that detects detection current I of which the amplitude the voltage V1 is reflected on and which is mainly composed of the same frequency component as at least one even number order higher harmonic component (secondary higher harmonic component) among even number order higher harmonic components for a basic wave component of the drive current Idv.SELECTED DRAWING: Figure 1
申请公布号 JP2016095227(A) 申请公布日期 2016.05.26
申请号 JP20140231460 申请日期 2014.11.14
申请人 HIOKI EE CORP 发明人 YANAGISAWA KOICHI
分类号 G01R29/12;G01R19/00 主分类号 G01R29/12
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