MEMS Balanced Inertial Angular Sensor And Method For Balancing Such A Sensor

摘要

The invention relates to a vibrating MEMS inertial angular sensor including a substrate for supporting at least two mass bodies mounted to bear mobile relative to the substrate and associated with at least one electrostatic actuator and at least one electrostatic detector. The sensor includes first means for suspending the mass bodies relative to the substrate and means for coupling the mass bodies together. The substrate is connected to a stationary rack by second suspension means.

主权项

1. A vibrating inertial angular sensor of the MEMS type comprising a substrate for supporting at least two mass bodies having substantially the same mass, which are mounted to be mobile relative to the substrate and which are associated with at least one electrostatic actuator and at least one electrostatic detector, characterized in that the sensor comprises first means for suspending the mass bodies relative to the substrate and means for coupling the mass bodies together, and in that the substrate is connected to a stationary rack by second suspension means, so that the mass bodies and the substrate are mobile relative to the stationary rack parallel to the plane of suspension, with the suspension means being isotropic in the plane of suspension.