发明名称 |
VERTICAL MEMORY DEVICE WITH BIT LINE AIR GAP |
摘要 |
A structure includes a three-dimensional semiconductor device including a plurality of unit device structures located over a substrate. Each of the unit device structures includes a semiconductor channel including at least a portion extending vertically along a direction perpendicular to a top surface of the substrate, and a drain region contacting a top end of the semiconductor channel. The structure also includes a combination of a plurality of contact pillars and a contiguous volume that laterally surrounds the plurality of contact pillars. The plurality of contact pillars is in contact with the drain regions, and the contiguous volume has a dielectric constant less than 3.9. |
申请公布号 |
WO2016048682(A3) |
申请公布日期 |
2016.05.26 |
申请号 |
WO2015US49597 |
申请日期 |
2015.09.11 |
申请人 |
SANDISK TECHNOLOGIES INC. |
发明人 |
RABKIN, PETER;XIA, JILIN;PACHAMUTHU, JAYAVEL |
分类号 |
H01L27/115 |
主分类号 |
H01L27/115 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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