| 摘要 |
PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter, an optical module, and an optical analysis device that reduce deflection generated on a substrate and improve resolving power.SOLUTION: A wavelength variable interference filter 5 comprises: a first reflecting film 56 disposed on a surface of a first substrate 51 facing a second substrate 52; a second reflecting film 57 disposed on a surface of the second substrate 52 facing the first substrate 51 and opposing to the first reflecting film 56; a first electrode 53 disposed on the surface of the first substrate 51 facing the second substrate 52; and a second electrode 54 disposed on the surface of the second substrate 52 facing the first substrate 51. The second substrate 52 includes: a movable section 522 provided with the second reflecting film 57; and a coupling/holding section 523 for holding the movable section 522 movable in a substrate thickness direction. The coupling/holding section 523 is formed to continuously surround the movable section 522 and to have thickness smaller than that of the movable section 522. The second electrode 54 is disposed on a portion of the second substrate 52 with thickness larger than that of the coupling/holding section 523.SELECTED DRAWING: Figure 3 |
