CLEAN AIR DEVICE AND DUST INSPECTING METHOD

摘要

With respect to a clean air device, in order to provide a device structure and a dust inspecting method, which are capable of supplying clean air through a filter and also capable of measuring the amount of dust in a workroom space in which blown air forms a laminar flow so as to accurately detect an increase in the amount of dust, this clean air device comprises: an air cleaning means; a rectifying means disposed at the downstream side of the air cleaning means to rectify air blown from the air cleaning means and generate a laminar flow; and a workroom disposed at the downstream side of the rectifying means, wherein at least one suctioning hole is provided in a wall surface in a space between the air cleaning means and the rectifying means to suction the air in said space and exhaust the air to the outside.