| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing device in which a brittle material substrate is not easily scratched.SOLUTION: A substrate processing device includes: a belt 11 for transferring a brittle material substrate 300; and a clamp device 40 for clamping the brittle material substrate 300 placed on the belt 11. A support surface 51A of the clamp device 40, which supports the brittle material substrate 300, is formed so as to be flush with an upper surface of the belt 11.SELECTED DRAWING: Figure 1 |
