| 摘要 |
PROBLEM TO BE SOLVED: To efficiently perform precise etching correction.SOLUTION: An etching characteristic storage part 212 of a data correction part 21 stores each etching characteristic with respect to each of plural object positions on an object, as each object etching characteristic. A characteristic group acquisition part 213 includes object positions corresponding to similar object etching characteristics in one characteristic group, thereby classifying the plural object positions to a predetermined number of characteristic group whose number is smaller than a number of the plural object positions. A division data correction part 217 divides design data of a pattern which is formed by etching on the object, into plural pieces of division data corresponding to plural division areas set on the object, then, corrects the respective division data based on the etching characteristic which is representative of one characteristic group to which the nearest object position of the division area corresponding to the division data belongs. Therefore, precise etching correction can be efficiently performed.SELECTED DRAWING: Figure 3 |
