| 摘要 |
PROBLEM TO BE SOLVED: To provide a production method of a coated member that makes damage as slight as possible to a substrate of which at least part of the surface forms a coated member, by raising a deposition speed of a DLC film as high as possible.SOLUTION: A raw gas containing at least a carbon-based compound, hexamethyldisiloxane as an oxygen-containing organosilicon-based compound, hydrogen gas and argon gas is introduced into a treatment chamber 3 housing a substrate 4, a steel material. The flow rate of the hexamethyldisiloxane is 0.01 or more relative to a total flow rate 2.20, in which the total flow rate of the carbon-based compound, the hydrogen gas and the argon gas is 2.20 to a standard flow rate. A production method of a coated member includes a DLC film deposition step for forming a DLC film 21 on the substrate 4 by applying voltage to the substrate 4 to generate plasma under a processing pressure of 100 Pa or higher and 400 Pa or lower.SELECTED DRAWING: Figure 1 |
