| 摘要 |
PROBLEM TO BE SOLVED: To control an external test auxiliary device in synchronization with a test signal without using a device test signal in a test device which tests a semiconductor integrated circuit using the external test auxiliary device.SOLUTION: A test device comprises: a clock signal generation circuit which generates a first clock signal; a sequence controller which divides the first clock signal to generate a second clock signal; a test circuit which generates a test signal in synchronization with the second clock signal; a parallel control circuit which generates a parallel control signal in synchronization with the second clock signal and supplies the signal to the external test auxiliary device; a serial I/F circuit which transmits or receives serial data between itself and the external test auxiliary device; a high-speed clock signal generation circuit which has a higher frequency than the frequency of the second clock signal, and generates a third clock signal synchronizing with the first clock signal and supplies the signal to the external test auxiliary device; and a tester controller.SELECTED DRAWING: Figure 1 |
