OPTICAL PATH MODIFICATION UNIT, MODULE, METHOD FOR EXTRACTING HIGH RESOLUTION IMAGE AND RECORDING MEDIUM RECORDING A PROGRAM FOR PERFORMING THE SAME AND APPARATUS FOR INSPECTING PATTERN ON SEMICONDUCTOR SUBSTRATE

摘要

An optical path modification unit for extracting a high resolution image according to an embodiment of the present invention is configured to allow light irradiated from a light source to be transmitted to an image sensor through a subject of which the position is fixed, and extract a second image having a second resolution higher than a first resolution based on a first image having the first resolution obtained through the incident light. According to the present invention, a plurality of low resolution images for extracting a high resolution image can be simply and conveniently obtained.