发明名称 PROBE AND PROBE CARD
摘要 PURPOSE: To provide a probe capable of enhancing connection reliability with electrodes.CONSTITUTION: A probe 100 includes a probe body 110 and connection parts 120a, 120b. The probe body 110 has a second end portion 120. The connection parts 120a, 120b are provided on the second end portion 112. The connection parts 120a, 120b have spring arms 121a, 121b which extend from the second end portion 112 and are curved so that their tips 121a1, 121b1 face the second end portion 112 with a gap G. As a result of load applied to the connection parts 120a, 120b, the spring arms 121a, 121b are elastically deformed toward the side of the second end portion 112 and the tips 121a1, 121b1 come into contact with 121a, 121b.SELECTED DRAWING: Figure 1B
申请公布号 JP2016095255(A) 申请公布日期 2016.05.26
申请号 JP20140232355 申请日期 2014.11.17
申请人 JAPAN ELECTRONIC MATERIALS CORP 发明人 YOSHIDA TAKASHI
分类号 G01R1/067;H01L21/66 主分类号 G01R1/067
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