| 摘要 |
PROBLEM TO BE SOLVED: To provide a profilometer device capable of holding an object under measurement further stably.SOLUTION: A profilometer device M comprises: an optical measurement system 1 that generates measurement data on a profile of an object under measurement SP using an optical interferometer; a profile computation unit 22 that computes the profile of the object under measurement SP using the measurement data generated by the optical measurement system 1; and a holder unit 3 for holding the object under measurement SP. The holder unit 3 includes: a holder body 31 having a flat surface; holding pieces (32-1 through 32-3) that are arranged on the flat surface of the holder body 31 to hold the object under measurement SP on edge portions thereof such that a first distance of 5 mm or less is kept between one surface SFb of the object under measurement SP and a flat surface SFa of the holder body 31; and an obliquely erecting mechanism 33 that erects the holder body 31 at a predetermined angle with a vertical direction in such a way that a second distance of 5 mm or less is kept between the other surface SFc of the object under measurement SP and a measurement surface SFd of the optical measurement system 1.SELECTED DRAWING: Figure 1 |
