| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing device which inhibits shape abnormality caused when a metal film or a resin film is processed.SOLUTION: A processing device according to one embodiment includes: a stage on which a sample may be placed; a rotation mechanism for rotating the stage; a nozzle configured to jet a material to the sample; a moving mechanism for relatively moving the stage and the nozzle in a direction perpendicular to a rotation axis of the stage; and a control part for controlling the moving mechanism.SELECTED DRAWING: Figure 1 |
