| 发明名称 |
SUBSTRATE CARRIER USING A PROPORTIONAL THERMAL FLUID DELIVERY SYSTEM |
| 摘要 |
A substrate carrier is described that uses a proportional thermal fluid delivery system In one example the apparatus includes a heat exchanger to provide a thermal fluid to a fluid channel of a substrate carrier and to receive the thermal fluid from the fluid channel, the thermal fluid in the fluid channel to control the temperature of the carrier during substrate processing. A proportional valve controls the rate of flow of thermal fluid from the heat exchanger to the fluid channel, A temperature controller receives a measured temperature from a thermal sensor of the carrier and controls the proportional valve in response to the measured temperature to adjust the rate of flow. |
| 申请公布号 |
US2016148822(A1) |
申请公布日期 |
2016.05.26 |
| 申请号 |
US201414555467 |
申请日期 |
2014.11.26 |
| 申请人 |
Criminale Phillip;Phi Justin;Marohl Dan A.;Shoji Sergio Fukuda;Mays Brad L. |
发明人 |
Criminale Phillip;Phi Justin;Marohl Dan A.;Shoji Sergio Fukuda;Mays Brad L. |
| 分类号 |
H01L21/67;H01L21/66;H01L21/683;H01J37/32;H01L21/3065 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus comprising:
a heat exchanger to provide a thermal fluid to a fluid channel of a substrate carrier and to receive the thermal fluid from the fluid channel, the thermal fluid in the fluid channel to control the temperature of the carrier during substrate processing; a proportional valve to control the rate of flow of thermal fluid from the heat exchanger to the fluid channel; and a temperature controller to receive a measured temperature from a thermal sensor of the carrier and to control the proportional valve in response to the measured temperature to adjust the rate of flow. |
| 地址 |
Livermore CA US |
