| 发明名称 |
IMAGE MEASURING APPARATUS AND MEASURING APPARATUS |
| 摘要 |
An image measuring apparatus includes a sample stage having a placement surface on which an object to be measured is placed; an image capture apparatus facing the placement surface of the sample stage and capturing an image of the object to be measured; and a pattern projection apparatus projecting a predetermined pattern onto the sample stage, the predetermined pattern providing a reference for at least one of a placement position and direction of the object to be measured on the placement surface. |
| 申请公布号 |
US2016146594(A1) |
申请公布日期 |
2016.05.26 |
| 申请号 |
US201514947368 |
申请日期 |
2015.11.20 |
| 申请人 |
MITUTOYO CORPORATION |
发明人 |
NISHIO Yukimasa;IWATA Toshikazu;MORIUCHI Eisuke |
| 分类号 |
G01B11/02 |
主分类号 |
G01B11/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An image measuring apparatus comprising:
a sample stage having a placement surface on which an object to be measured is to be placed; an imager facing the placement surface of the sample stage and configured to capture an image of the object to be measured; and a pattern projector configured to project a predetermined pattern onto the sample stage, the predetermined pattern providing a reference for at least one of a placement position and a direction of the object to be measured on the placement surface. |
| 地址 |
Kanagawa JP |
