| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a hard film-coated member which has less defects on the surface of a carbon film such as a DLC film, excellent adhesion between a base material and the carbon film, low aggressiveness against mating materials, and a low friction coefficient, and a method for manufacturing the same. <P>SOLUTION: The method for manufacturing the hard film-coated member includes the steps of forming a 1-30 μm thick nitrogen-containing chromium film on the base material by sputtering in an atmosphere containing argon gas and nitrogen gas in a vacuum treatment chamber of a treatment device using a chromium target, and thereafter forming the carbon film on the nitrogen-containing chromium film by introducing the argon gas and nitrogen gas into the vacuum treatment chamber of the treatment device which uses the carbon target and by sputtering at -250 V or less, favorably -280 V or less bias voltage in an atmosphere where the ratio of the partial pressure of the nitrogen gas to the sum of the pressures of argon gas and nitrogen gas is 0.23 or more, favorably 0.37 or more. <P>COPYRIGHT: (C)2013,JPO&INPIT |
