发明名称 OXIDE SINTERED BODY AND TABLETS OBTAINED BY PROCESSING SAME
摘要 The present invention discloses a tablet for ion plating, which is capable of providing high speed film formation of a transparent conductive film suitable for a solar cell, and continuing film formation without generating crack, fracture or splash; and an oxide sintered body for obtaining the same. The oxide sintered body etc. comprising indium oxide as a main component, and tungsten as an additive element, content of tungsten being 0.001 to 0.15, as an atomic ratio of W/ (In + W), characterized in that said oxide sintered body is mainly composed of a crystal grain (A) composed of the indium oxide phase with a bixbyite type structure, where tungsten does not make a solid solution, and a crystal grain (B) composed of the indium oxide phase with a bixbyite type structure, where tungsten does not make a solid solution, and has a density of 3.4 to 5.5 g/cm 3 .
申请公布号 EP2671855(B1) 申请公布日期 2016.05.25
申请号 EP20120742512 申请日期 2012.01.19
申请人 SUMITOMO METAL MINING CO., LTD. 发明人 NAKAYAMA TOKUYUKI
分类号 C04B35/01;C04B35/626;C23C14/34;H01B1/08;H01L31/0224;H01L51/44 主分类号 C04B35/01
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