| 摘要 |
Provided are an analysis device and an analysis method by secondary ions employing an atomic probe with which it is possible to avoid charge-up without carrying out a preparatory process on a sample. This analysis device comprises: a neutral particle beam source for projecting a neutral particle beam (N) into a sample (41); an ion acceleration means for accelerating secondary ions which are discharged from the sample; and a measuring device which measures either the energy or the mass of the secondary ions which are discharged from the sample wherein the neutral particle beam is projected. |
