发明名称 フィルム状接着剤、接着シート、及び半導体装置の製造方法
摘要 PROBLEM TO BE SOLVED: To provide a film-like adhesive capable of improving connection reliability in connection between a semiconductor element and a support member.SOLUTION: A film-like adhesive 1 includes: a thermosetting component containing (a1) at least either of an epoxy resin having a softening point of ≥85°C and an epoxy equivalent of ≥500 and a phenol resin having a softening point of ≥85°C and a hydroxyl equivalent of ≥500, (a2) at least either of an epoxy resin having a softening point of ≥85°C and an epoxy equivalent of ≤150 and a phenol resin having a softening point of ≥85°C and a hydroxyl equivalent of ≤150, and (a3) at least either of an epoxy resin having a softening point of ≤75°C and a phenol resin; (b) a prescribed high molecular weight component; and (c) an inorganic filler; wherein each content of the (a1) component, the (a2) component, the (a3) component, the high molecular weight component and the inorganic filler is within each prescribed range.
申请公布号 JP5924145(B2) 申请公布日期 2016.05.25
申请号 JP20120132850 申请日期 2012.06.12
申请人 日立化成株式会社 发明人 徳安 孝寛;青木 正之;稲葉 憲子
分类号 C09J7/00;C09J7/02;C09J11/04;C09J161/04;C09J163/00;H01L21/52 主分类号 C09J7/00
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