发明名称 バイト切削装置
摘要 PROBLEM TO BE SOLVED: To provide a cutting apparatus with a cutting tool capable of reducing a risk of adhering cut waste to an upper face of a workpiece and scratching of the upper face by removing the cut waste from the upper face of the workpiece.SOLUTION: A cutting apparatus with a cutting tool for cutting a workpiece is provided with: a chuck table for holding a workpiece; a cutting means with the cutting tool including a cutting tool wheel composed of a cutting tool shank including a cutting edge cutting the workpiece held by the chuck table, and a wheel base mounted with the cutting tool shank, a spindle to which the cutting tool wheel is mounted and a drive source for rotating the spindle; and a cleaning liquid supply means for supplying a cleaning liquid to the workpiece cut by the cutting means with the cutting tool. The cleaning liquid supply means includes: a cleaning liquid supply source; a cleaning liquid supply passage connected to the cleaning liquid supply source to penetrate a center of the spindle and formed in an inside of the wheel base; and a cleaning liquid jetting port communicating with the cleaning liquid supply passage formed on a rotating locus of the cutting tool shank.
申请公布号 JP5925050(B2) 申请公布日期 2016.05.25
申请号 JP20120116410 申请日期 2012.05.22
申请人 株式会社ディスコ 发明人 坂本 武士
分类号 B23Q11/10;B23D5/02;B23Q11/00;H01L21/304;H01L21/60 主分类号 B23Q11/10
代理机构 代理人
主权项
地址