Kühlsystem für ein optisches Element einer Laseranlage und Anordnung einer Laseranlage mit einem Kühlsystem

摘要

The invention relates to a cooling system for at least one pressure-controlled optical element, in particular for at least one adaptive laser mirror (26). The cooling system has a pressure control device (30), by means of which the pressure acting on the optical element can be adjusted by changing the static fluid pressure component of the element cooling fluid by means of a pressure feed-in chamber (31). The invention further relates to a laser system (Fig. 1) for machining workpieces, comprising a rotationally driven system unit (6). The system unit (6) is provided with a closed element-cooling-fluid system (27) for at least one optical element (26) on the system unit (6).