发明名称 |
SEALANT LAMINATED COMPOSITE, SEALED SEMICONDUCTOR DEVICES MOUNTING SUBSTRATE, SEALED SEMICONDUCTOR DEVICES FORMING WAFER, SEMICONDUCTOR APPARATUS, AND METHOD FOR MANUFACTURING SEMICONDUCTOR APPARATUS |
摘要 |
It is an object of the invention to provide a sealant laminated composite that is very high in versatility, even when a large diameter or thin substrate or wafer is sealed, can prevent the substrate or wafer from warping and the semiconductor devices from peeling, can collectively seal a semiconductor devices mounting surface of a substrate on which semiconductor devices are mounted or a semiconductor devices forming surface of a wafer on which semiconductor devices are formed on a wafer level, and can provide a sealant laminated composite that is excellent in the heat resistance and humidity resistance after sealing. A sealant laminated composite for collectively sealing a semiconductor devices mounting surface of a substrate on which semiconductor devices are mounted or a semiconductor devices forming surface of a wafer on which semiconductor devices are formed includes: a support wafer; and an uncured resin layer constituted of an uncured thermosetting resin formed on one side of the support wafer. |
申请公布号 |
EP3024021(A1) |
申请公布日期 |
2016.05.25 |
申请号 |
EP20150003520 |
申请日期 |
2013.02.06 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
SHIOBARA, TOSHIO;AKIBA, HIDEKI;SEKIGUCHI, SUSUMU |
分类号 |
H01L23/29;H01L21/56;H01L21/60;H01L23/31;H01L23/488 |
主分类号 |
H01L23/29 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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