发明名称 RESIN CONTAINER COATING DEVICE
摘要 An object of the present invention is to suppress enlargement in a high frequency power source and improve production efficiency. A resin container coating device of the present invention includes a plurality of chambers (40A, 40B, 40C, 40D) storing a plurality of resin containers (B) respectively in independent states, a plurality of internal electrodes (50) in which gas conductive parts (51) for conducting a source gas are formed to inner peripheral parts thereof and which are respectively inserted inside the plurality of resin containers (B) stored in the chambers, a gas supply unit (70) for supplying the source gas to the plurality of chambers (40A, 40B, 40C, 40D), a high frequency power source (80) for supplying a high frequency electric power to the plurality of chambers (40A, 40B, 40C, 40D), and an electric power switching part (85) capable of switching a supply designation of the high frequency electric power, which is supplied from the high frequency power source (80), from first and second chambers (40A, 40B) forming a first unit (U1) to third and fourth chambers (40C, 40D) forming a second unit (U2).
申请公布号 EP2918703(A4) 申请公布日期 2016.05.25
申请号 EP20130853061 申请日期 2013.11.07
申请人 NISSEI ASB MACHINE CO., LTD. 发明人 SHIMADA KIYONORI
分类号 C23C16/509;B65D23/02;C23C16/04;C23C16/503;H01J37/32 主分类号 C23C16/509
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