| 摘要 |
A turbo-molecular pump comprises: a rotor; stationary blades; a stator; a plurality of spacers; a heater disposed on the base; a temperature sensor for detecting a temperature of the stator; and a temperature regulation section for on/off controlling the heater based on a temperature detected by the temperature sensor to regulate the temperature of the stator so as to be a reaction product accumulation prevention temperature. At least one spacer arranged on a base side of the plurality of spacers is cooled by coolant, and the turbo-molecular pump further comprises a heat insulation member disposed between the base and the spacer arranged on the base. |
