| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device or a charged particle microscope which allows a user to observe an observation sample in an air atmosphere or a gas atmosphere, without significantly changing the configuration of a conventional high-vacuum charged particle microscope.SOLUTION: Provided is a charged particle beam device which adopts a thin film for separating a vacuum atmosphere from an air atmosphere (or a gas atmosphere). An attachment capable of holding the thin film and keeping the interior in an air atmosphere or a gas atmosphere is inserted into and used in a vacuum sample chamber of a high-vacuum charged particle microscope. The attachment is vacuum-sealed and fixed to a vacuum partition wall of the vacuum sample chamber. Image quality is further improved by replacing the interior of the attachment with light-element gas, such as helium, nitrogen or water vapor, which has a mass lighter than that of atmospheric gas. |
