| 摘要 |
The present invention relates to an apparatus for removing moisture from a gas container, and to an apparatus for vacuuming the moisture from the inside of the gas container by heating the gas container. The apparatus for removing moisture from a gas container of the present invention comprises: a heating jacket for installing the gas container inside and heating the same; a dry pump and a turbo-pump for maintaining the inside of the gas container under the negative pressure; and a manifold equipped with a plurality of inflow ports for connecting the dry pump and the turbo-pump to the gas container. According to the present invention, the apparatus for removing moisture from a gas container is capable of improving the production efficiency of ultra-high purity gas and reducing production costs. |
