| 摘要 |
The present invention relates to a wire grid polarizer and a manufacturing method thereof, wherein the manufacturing method comprises the steps of: sequentially laminating a conductive wire pattern layer, a fist neutral layer, a guide pattern layer, and a second neutral layer on a substrate; forming an etching prevention pattern on the second neutral layer; patterning the second neutral layer and the guide pattern layer by using the etching prevention pattern, thereby forming a second neutral layer pattern and a guide pattern; applying a block copolymer of two monomers with having a different etching rate on the first neutral layer and the second neutral layer; aligning the block copolymer; selectively removing one monomer block among the aligned copolymer; and a patterning the conductive wire pattern layer by using a remaining monomer block, the second neutral layer pattern and the guide pattern. Thereby, the manufacturing method of a wire grid polarizer according to the present invention can provide a wire grid polarizer having remarkable optical characteristics. |
