DATA CORRECTING APPARATUS, DRAWING APPARATUS, INSPECTION APPARATUS, DATA CORRECTING METHOD, DRAWING METHOD, INSPECTION METHOD AND RECORDING MEDIUM

摘要

An etching property memory unit (212) of a data correcting unit (21) memorizes an etching feature with respect to each of a plurality of object positions on an object as an object etching feature. A feature group obtaining unit (213) includes an object position corresponding to an object etching feature which is similar thereto in one feature group so as to divide a plurality of object positions into feature groups having the particular number which is lower than the number of the object positions described in the etching property memory unit (212). A division data correcting unit (217) divides design data of a pattern formed by etching on an object into a plurality of data corresponding to a plurality of division regions set on the object, and corrects each of the division data on the basis of an etching feature which represents one feature group containing the nearest object position of the division regions corresponding to the division data. Accordingly, high precision etching correction may be effectively performed.