APPARATUS AND METHOD FOR EVALUATION PLATFORM OF CHARGED PARTICLE BEAM SYSTEM

摘要

The present invention relates to an evaluation platform device for measuring and evaluating the position, size, and angular current density of a virtual charged particle source to understand the characteristics of measuring and processing devices based on a charged particle beam such as an electron beam or an ion beam and to a method for evaluating a charged particle beam system. The evaluation platform device according to the present invention comprises: a chamber through which a charged particle beam discharged from a charged particle source passes; an aperture provided in the chamber and positioned in the path of the charged particle beam to limit the size of the charged particle beam; and a screen provided on one side of the chamber and positioned in the path of the charged particle beam to display an image of the charged particle beam passing through the aperture. The evaluation platform device evaluates at least one from the charged particle beam system and the charged particle source based on the image of the charged particle beam displayed on the screen. Therefore, the precise evaluation of the charged particle beam system and the charged particle source can be performed by one platform device.