MATERIAL FOR CONVERSION OF VACUUM ULTRAVIOLET RADIATION INTO VISIBLE RANGE RADIATION IN FORM OF AMORPHOUS FILM OF SILICON OXIDE SiOSON SILICON SUBSTRATE

摘要

FIELD: chemistry.SUBSTANCE: invention relates to luminescent materials for conversion of vacuum ultraviolet radiation into visible range radiation, intended for manufacture of functional elements new-generation photon devices, as well as to control of hard ultraviolet radiation in vacuum processes. Proposed material is characterised by that thickness of amorphous film of silicon oxide SiOSis 20-70 nm, and oxygen ions are contained in an amount at which stoichiometric factor x ranges from 0.01 to 0.45.EFFECT: invention provides high intensity of blue radiation of material and absence of red luminescence while maintaining conversion of vacuum ultraviolet radiation into visible radiation.1 cl, 3 dwg, 1 tbl, 5 ex