发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 A semiconductor device and a method of fabricating the same are provided. The semiconductor device includes a substrate including a first region and a second region, a first transistor and a second transistor formed on the first region and the second region, respectively, a first contact formed on the first transistor, and a second contact formed on the second transistor. The first contact includes a first work function control layer having a first thickness and a first conductive layer formed on the first work function control layer, the second contact includes a second work function control layer having a second thickness different from the first thickness and a second conductive layer formed on the second work function control layer, and the first contact and the second contact have different work functions.
申请公布号 US2016141243(A1) 申请公布日期 2016.05.19
申请号 US201514712136 申请日期 2015.05.14
申请人 Samsung Electronics Co., Ltd. 发明人 YOU Jung-Gun;HSU Wei-Hua;LEE Choong-Ho;LEE Hyung-Jong
分类号 H01L23/522;H01L27/088;H01L23/535;H01L27/092 主分类号 H01L23/522
代理机构 代理人
主权项 1. A semiconductor device comprising: a substrate including a first region and a second region; a first transistor and a second transistor formed on the first region and the second region, respectively; a first contact formed on the first transistor; and a second contact formed on the second transistor, wherein the first contact includes a first work function control layer having a first thickness and a first conductive layer formed on the first work function control layer, the second contact includes a second work function control layer having a second thickness different from the first thickness and a second conductive layer formed on the second work function control layer, and the first contact and the second contact have different work functions.
地址 Suwon-si KR