发明名称 Multi-shaft Vacuum Manipulator Shafting Accuracy Testing Device
摘要 This invention provides a multi-shaft vacuum manipulator shafting testing device that is simple in structure, convenient for assembly and disassembly and strong in practicality. That device consists of test bed, manipulator direct drive unit, angle encoder installation support, angle encoder, connecting flange and laser displacement detecting device. The manipulator direct drive unit is mounted on the test bed through the flange. The angle encoder installation support is fixed through bolt on the test bed on one end, and the other end has the angle encoder installed on it through bolt. One end of the connecting flange connects with the shafting of the manipulator direct drive unit. The other end is connected by a flexible coupling with the angle encoder shaft. The flexible coupling compensates the axial movement error and the nonalignment error between the encoder and connecting flange to avoid too much force acting on the bearing of the angle encoder. The laser displacement detecting device consists of two laser displacement sensors and a two-dimensional mobile platform, which can adjust the range of measurement. This invention has such advantages as high measurement accuracy, convenient test operation and wide application scope and low test cost.
申请公布号 US2016141195(A1) 申请公布日期 2016.05.19
申请号 US201615011542 申请日期 2016.01.30
申请人 SHANGHAI JIAO TONG UNIVERSITY 发明人 Liu Pinkuan;Wu Jing
分类号 H01L21/68;G01D5/26 主分类号 H01L21/68
代理机构 代理人
主权项 1. A kind of multi-shaft vacuum manipulator shafting accuracy testing device characterized by including test bed (1), manipulator direct drive unit (2), connecting flange (3), flexible coupling (4), angle encoder (5), angle encoder installation support (6) and laser displacement detecting device (7), the said angle encoder installation support (6) connecting with the said test bed (1), the said angle encoder (5) connecting with the said angle encoder installation support (6); the said connecting flange is set up on the said test bed (1) with the two upper and lower ends connecting with the said flexible coupling (4) and manipulator direct drive unit (2) respectively, the said flexible coupling (4) connecting with the said angle encoder (5), the said laser displacement detecting device (7) connecting with the said connecting flange (3).
地址 Shanghai CN