发明名称 ASSEMBLING DEVICES FOR PROBE CARD TESTING
摘要 An example process places dice that have been cut from a first semiconductor wafer on a second wafer. The example process includes arranging the dice in a pattern on a the second wafer, where the second wafer has a coefficient of thermal expansion that has substantially a same coefficient of thermal expansion as the dice; and using a probe card that is matched to a pattern of dice in connection with the second wafer.
申请公布号 WO2016077217(A1) 申请公布日期 2016.05.19
申请号 WO2015US59713 申请日期 2015.11.09
申请人 TERADYNE, INC. 发明人 SINSHEIMER, ROGER ALLEN
分类号 G01R31/26;G01R1/067;H01L21/301;H01L21/78 主分类号 G01R31/26
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