ACTUATOR, SPECIMEN POSITIONING DEVICE, AND CHARGED PARTICLE RAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an actuator capable of reducing vibration to be generated in an output shaft.SOLUTION: An actuator 100 according to the present invention includes: a motor part 10; a ball spline 20 of a finite stroke provided with a shaft 22 provided with a rolling groove 23 that permits rolling of a ball 24 and is disposed along a shaft; and a nut part 32 which is provided with a female thread 33 engaged with a male thread 34 formed in a shaft 22, and which transmits torque of the motor part 10 to the shaft 22.SELECTED DRAWING: Figure 1