发明名称 DIRECT-ACTING TABLE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a direct-acting table device in which a device length in an axial direction of a drive screw shaft can be shortened.SOLUTION: A direct-acting table device 1 is equipped with: a drive screw shaft 11 for a main table which is so rotatably pivoted that an axial direction thereof becomes one direction; and a drive screw shaft 31 for a weight table which is so rotatably pivoted that an axial direction thereof becomes one direction. A drive motor 18 for rotationally driving either the drive screw shaft 11 for the main table or the drive screw shaft 31 for the weight table is provided, and further, a first gear 41 fixed to an end of the drive screw shaft 11 for the main table, and a second gear 42 which is fixed to an end of the drive screw shaft 31 for the weight table and is engaged with the first gear are provided. The drive screw shaft 11 for the main table and the drive screw shaft 31 for the weight table are arranged in parallel in a direction orthogonal to said one direction as an axial direction.SELECTED DRAWING: Figure 2
申请公布号 JP2016083754(A) 申请公布日期 2016.05.19
申请号 JP20140220239 申请日期 2014.10.29
申请人 NSK LTD 发明人 JO ISAMU;OTANI YUJI
分类号 B23Q1/72;B23Q1/58;B65G49/07;H01L21/027;H01L21/677 主分类号 B23Q1/72
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