| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology capable of suppressing operation rate degradation of an apparatus accompanying exchange of a raw material vessel 3, in supplying a raw material obtained by sublimation of WClto deposition process units 1A-1C.SOLUTION: A first raw material capture unit 41 and a second raw material capture unit 42 are installed in parallel in each of raw material supply systems 2A-2C arranged between a raw material vessel 3 and each of deposition units 1A-1C. A raw material gas is supplied to each of the first raw material capture unit 41 and the second raw material capture unit 42 and solidified again, and the solidified raw material is then sublimated by heating the first raw material capture unit 41 and the second raw material capture unit 42 and supplied to the deposition process unit 1A. The raw material is supplied from the first and second raw material capture units 41, 42 to the deposition process unit 1A (1B, 1C) in parallel with an exchange work of the raw material vessel 3, and therefore operation rate degradation of an apparatus accompanying the exchange of a raw material vessel 3 is suppressed.SELECTED DRAWING: Figure 2 |
