CHARGED PARTICLE BEAM IRRADIATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam irradiation device capable of securing a sufficient irradiation field while being capable of suppressing being large-sized.SOLUTION: A charged particle beam irradiation device according to an embodiment comprises: a first scan electromagnet unit for deflecting a charged particle beam in a second direction substantially orthogonal to a first direction that is the charged particle beam's incident direction; and a second scan electromagnet unit for deflecting the charged particle beam in a third direction substantially orthogonal to the first and second directions. The first and second scan electromagnet units are arranged in parallel with the first direction.SELECTED DRAWING: Figure 1