| 摘要 |
[Problem] To provide a vacuum pump and a method for estimating a cause of anomaly in such vacuum pump, with which it is possible to analyze and take appropriate action against a cause of contact when contact is detected between a rotor and a stator. [Solution] In the present invention, a contact determination is carried out on the basis of a rotor contact determination threshold value B1 regarding a displacement signal and a rotor contact determination threshold value B2 regarding an acceleration signal. Determination of an amount of unbalance of a rotor 103 is also carried out on the basis of an unbalance amount increase determination threshold value A1 regarding a displacement signal and an unbalance amount increase determination threshold value A2 regarding an acceleration signal. If, in either the displacement signal or the acceleration signal, the unbalance amount increase determination threshold value A1 or unbalance amount increase determination threshold value A2 is exceeded within a predetermined duration prior to when a contact estimation time is determined, then contact is determined not to have been caused by increased deposition of a product. If, however, neither is exceeded within the predetermined duration, then contact is determined to have been caused by increased deposition of a product. |
