| 发明名称 |
ARCHIMEDES BRUSH FOR SEMICONDUCTOR CLEANING |
| 摘要 |
A cleaning device for cleaning a substrate is provided. In one aspect, the cleaning device includes a brush engaged with a mandrel, and the brush forms an Archimedean screw thread form. The brush is formed of an absorbent material, preferably foam. In one aspect, the brush is seated within a groove in the mandrel. |
| 申请公布号 |
WO2016077030(A1) |
申请公布日期 |
2016.05.19 |
| 申请号 |
WO2015US55998 |
申请日期 |
2015.10.16 |
| 申请人 |
ILLINOIS TOOL WORKS INC. |
发明人 |
WITHERS, BRADLEY SCOTT;NELSON, ERIK SCOTT;WILLIS, ROBERT ALLEN |
| 分类号 |
A46B13/00;A46D1/00;H01L21/67 |
主分类号 |
A46B13/00 |
| 代理机构 |
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代理人 |
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