| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment device that can adjust heat insulation capability for each region.SOLUTION: A heat treatment device comprises: a treatment container 4; a heating element 48 provided around the treatment container; a plurality of heat insulation means 51 separately provided around the heating element so as to cover different regions of the heating element; a plurality of exhaust pipes 70 connected to the plurality of heat insulation means respectively; and evacuation means 90 connected to the plurality of exhaust pipes.SELECTED DRAWING: Figure 2 |
