发明名称 PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT AND MOBILE BODY
摘要 PROBLEM TO BE SOLVED: To provide a physical quantity sensor, electronic equipment, and a mobile body capable of detecting a physical quantity around a plurality of axes while avoiding increase in size.SOLUTION: The physical quantity sensor includes: an IC 3 having a rectangular shape in a plan view and four outer edges 31 to 34; a vibration element 4 that is disposed on a main surface of the IC 3 and has a part protruding from the outer edge 34 and not overlapping the IC 3 in a plan view; and a vibration element 5 that is disposed between the vibration element 4 and the outer edge 33 on the main surface of the IC 3, has a part protruding from the outer edge 32 and not overlapping the IC 3 in a plan view, and has a detection axis in a direction different from that of a detection axis of the vibration element 4.SELECTED DRAWING: Figure 3
申请公布号 JP2016085176(A) 申请公布日期 2016.05.19
申请号 JP20140219769 申请日期 2014.10.28
申请人 SEIKO EPSON CORP 发明人 AOKI SHINYA;KAWAUCHI OSAMU;NISHIZAWA RYUTA;SHIMURA TADASHI
分类号 G01C19/5628;H01L25/00;H01L41/053;H01L41/09;H01L41/113 主分类号 G01C19/5628
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