DISPLAY INCLUDING SENSORS

摘要

This disclosure provides devices, systems and methods for providing MEMS display elements in a display region and MEMS sensors in a shelf region. In one aspect, a display device includes a first substrate with a display region and a shelf region extending from the display region, and a second substrate over the display region and a portion of the shelf region. MEMS display elements can be in the display region and MEMS sensors can be in the covered portion of the shelf region. In some implementations, the MEMS sensors are formed simultaneously as the MEMS display elements. In some implementations, the MEMS sensors share at least two or more thin film layers with the MEMS display elements. In some implementations, the MEMS sensors are sealed by a hermetic seal and the MEMS display elements are sealed by a non-hermetic seal.

主权项

1. A display device, comprising:
a first substrate having a display region and a shelf region; a plurality of MEMS display elements in the display region, each of the display elements including two or more thin film layers; one or more MEMS devices in the shelf region, each of the MEMS devices including the same two or more thin film layers; a second substrate over the plurality of MEMS display elements in the display region and over the one or more MEMS devices in the shelf region; a first seal around the MEMS display elements in the display region and between the first substrate and the second substrate; and a second seal around the MEMS devices in the shelf region and between the first substrate and the second substrate, wherein the second seal is different than the first seal.