X-RAY DEVICE AND MANUFACTURING METHOD OF STRUCTURE

摘要

Provided is a device capable of suppressing a drop in detection accuracy, and a manufacturing method of a structure. A detection device is a device that irradiates a subject with X-rays and detects the X-rays transmitting through the subject, and includes an X-ray source that emits X-rays, a table that holds the subject, a detector that detects at least a portion of the transmitted X-rays emitted from the X-ray source and transmitted through the subject, and a first guide device and a second guide device that guide movement of the table in a direction parallel to an optical axis of the X-ray source while supporting the table. In this detection device, a guide plane, which is parallel to the optical axis and is a plane to which the movement of the table is regulated, passes through the inside of a detection region of the transmitted X-rays of the detector.

主权项

1. An X-ray device configured to irradiate a measurement object with X-rays and detect X-rays transmitted through the measurement object, the device comprising:
an X-ray source configured to emit X-rays from a light emission point; a stage configured to support the measurement object; a detector configured to detect at least a portion of transmitted X-rays that have been emitted from the X-ray source and transmitted through the measurement object; a movement device configured to move one of the X-ray source, the stage, or the detector in a first direction as a mobile object in order to change at least one of a distance between the light-emission point and the measurement object or a distance between the light-emission point and the detector; and a first measurement device and a second measurement device each configured to measure a position of the mobile object in the first direction, the first measurement device and the second measurement device being disposed along a second direction orthogonal to the first direction in a mobile region of the movement device.