主权项 |
1. A workpiece processing apparatus for processing a warped workpiece, the workpiece having a plate shape and having a first surface and a second surface, the workpiece having a recessed portion at the second surface, and a non-working area located at an area near an edge of the workpiece, the workpiece processing apparatus comprising:
a base; a carrier having a loading surface and a plurality of suction units, each of the plurality of suction units being disposed inside the carrier; and an adjusting device having an adjusting surface, and at least one adjusting portion protruded from the adjusting surface; wherein the first surface of the workpiece is partially contacted with the loading surface of the carrier; wherein at least one of the adjusting device and the carrier is movably connected with the base, such that the adjusting device and the carrier are movable with respect to each other, so as to make the adjusting surface to face the loading surface and the second surface; and make the at least one adjusting portion to be contacted with the second surface and the non-working area, thereby the first surface is contacted with the loading surface more evenly and the workpiece becomes an adjusted workpiece. |