| 摘要 |
PROBLEM TO BE SOLVED: To provide an internal temperature measurement device capable of more precisely measuring internal temperature of a measurement target with a quick response, where the heat resistance value of a non-heat generation body positioned at the surface side is unknown.SOLUTION: An internal temperature measurement device 10 includes: two cells 20a and 20b measuring two heat fluxes to calculate internal temperature of a measurement target which has unknown heat resistance value in a non-heat generation body; and an MEMS chip 12 which has cells 20c for increasing the difference in the heat flux.SELECTED DRAWING: Figure 4 |
