| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing device hardly scratching a brittle material substrate.SOLUTION: A substrate processing device includes a belt 11 for conveying a brittle material substrate 300, and a clamp device 40 for cramping the brittle material substrate 300 placed on the belt 11, and the belt 11 and the clamp device 40 are connected together. A driving device 20 is further included, for driving the belt 11 and the clamp device 40 in the conveyance direction of the brittle material substrate 300 by transferring driving force to both of the belt 11 and the clamp device 40.SELECTED DRAWING: Figure 1 |
