| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric vibration piece which prevents disconnection of electrode patterns conductive with excitation electrodes, and to provide a piezoelectric device and a manufacturing method of the piezoelectric vibration piece.SOLUTION: In a piezoelectric vibration piece, excitation electrodes 30 are provided on principal surfaces 12a and 12b of a piezoelectric base plate 12, and electrode patterns 32 conductive with excitation electrodes 30 are provided at a base end 18 side for supporting the piezoelectric base plate 12 in a cantilever manner. In the piezoelectric vibration piece, the electrode patterns 32 are drawn around entering portions 22 where an angle between the one principal surface 12a or 12b and a side surface 12c of the piezoelectric base plate 12 becomes an obtuse angle due to wet etching when an outer shape of the piezoelectric base plate 12 is formed.SELECTED DRAWING: Figure 1 |
